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  • 产品名称：PELCO®氮化硅涂层和Si 3mm光盘（空白）

  • 产品型号：21555-10
  • 产品厂商：其它品牌
  • 产品文档：
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简单介绍：
These 3mm Silicon discs have an ultra-flat (Ra 0.45 ± 0.2nm) 50nm ultra-low-stress Silicon Nitride layer on both sides. Also available with a hydrophilic or hydrophobic surface coating or just as a si
详情介绍：

Product Specifications
Film Thickness: 50nm ultra-low-stress Silicon Nitride on both sides
Hydrophilic: 5nm atomic layer-deposited hydroxylated alumina on 50nm ultra-low-stress silicon nitride More Details
Hydrophobic: 5nm atomic layer-deposited alumina and fluoro-methylsilane on ultra-low-stress silicon nitride. More Details
Disk Thickness: 200µm silicon support
Disk Diameter: 3mm
Surface Roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
Packaging: The PELCO® Silicon Aperture Frames are packaged under cleanroom conditions in the PELCO® #160 TEM Grid Storage box. Each box holds 10 discs.
Prod # Description Unit
21555-10
PELCO® Silicon Nitride Discs, Ø3mm
pkg/10
21556-10
PELCO® Silicon Nitride Discs with hydrophilic coating, Ø3mm
pkg/10
21557-10
PELCO® Silicon Nitride Discs with hydrophobic coating, Ø3mm
pkg/10
21558-10
PELCO® Silicon Discs, Ø3mm
pkg/10

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