产品名称：用于TEM的PELCO®多孔氮化硅支撑膜

This design has a number of advantages over previously offered products:

Relatively large open area
Added resilience of membrane
Practical hole size for experiments
A boundary of 25µm non-perforated membrane surrounding the holey membrane area
TEM standard circular shape
EasyGrip™ edge for improved handling
The Silicon Nitride Support Films are resistant to solvents, acids and bases, allowing for dynamic experiments directly on the holey membrane. The Silicon Nitride Support Films allow for high temperature experiments/imaging up to 1000°C. Films can be easily cleaned using glow discharge or plasma cleaning techniques. They also provide a carbon-free background for TEM imaging and analysis. The clean manufacturing techniques avoid the debris particles that are often found on other makes of silicon nitride support films.

Product Specifications
Defining parameters for the PELCO® Holey Silicon Nitride Support Films are:
Membrane Thickness: 200nm for added resilience
Window Size: 0.5 x 0.5mm
Hole Size and Pitch: 2.5µm circular holes with a 4.5µm pitch
Pattern: Close packed hexagonal arrangement of 100 x 100 rows/columns with a total of 10,000 holes. A 25um boundary of non-perforated membrane surrounds the perforated area
Perforated Area: 0.45 x 0.45mm
Frame Thickness: Silicon support structure is 200µm standard. This allows for fitting in standard TEM holders and gives a sturdy support frame
Surface Roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
Frame Diameter: TEM standard 3mm diameter disc, fully compatible with regular TEM holders and with EasyGrip™ edges for improved handling
Packaging: The PELCO® Holey Silicon Nitride Support Films are packaged under cleanroom conditions in the PELCO® #160 TEM Grid Storage Box. Each box holds 10 support films

Prod #	Description	Unit

21535-10

PELCO® Holey Silicon Nitride Support Film, 200nm, 2.5µm holes, 0.5 x 0.5mm window, Ø3mm

pkg/10

The Silicon Nitride Assortment Pack

with various membrane thicknesses and sizes
The Silicon Nitride Assortment Pack is the ideal way to determine which membrane thickness or size of silicon nitride or silicon dioxide is the optimum product for your application. The assortment pack includes the following thickness and window sizes on 200um thick silicon frames:
1 ea Si3N4 15nm membrane with 0.25x0.25mm window
1 ea Si3N4 15nm membrane with 9 ea 0.1x0.1mm windows
1 ea Si3N4 50nm membrane with 0.25x0.25mm window
1 ea Si3N4 50nm membrane with 9 ea 0.1x0.1mm windows
1 ea Si3N4 50nm membrane with 0.5x0.5mm window
1 ea Si3N4 50nm membrane with 0.75x0.75mm window
1 ea Si3N4 200nm membrane with 0.25x0.25mm window
1 ea Si3N4 200nm membrane with 0.5x0.5mm window
1 ea SiO2 40nm membrane with 0.5x0.5mm window
1 ea Holey Si3N4 200nm membrane with 2.5um holes with 0.5x0.5mm window

Prod #	Description	Unit

21597-10

Silicon Nitride Assortment Pack (10 different membranes)

each