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  • 产品名称：PELCO®氮化硅涂层光盘

  • 产品型号：21555
  • 产品厂商：其它品牌
  • 产品文档：
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简单介绍：
These 3mm silicon disks have a 50nm ultra low stress silicon nitride layer (Si3N4) on both sides and can be used as specimen disks for AFM applications which need a Si3N4 background. Provide smooth ba
详情介绍：

PELCO® Silicon Nitride Coated 3mm Disks (blanks)

These 3mm silicon disks have a 50nm ultra low stress silicon nitride layer (Si3N4) on both sides and can be used as specimen disks for AFM applications which need a Si3N4 background. Provide smooth background: Surface roughness has RMS (Rg) of 0.65 ±0.06nm which gives a mean roughness (RA) of 0.45 ±0.02nm
Product Specifications

  • Film thickness: 50nm ultra low stress Si3N4 on both sides
  • Disc thickness: 200µm silicon support
  • Disc diameter: 3mm
  • Surface roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
  • Packaging: The PELCO® Silicon Aperture Frames are packaged under cleanroom conditions in the PELCO®# 160 TEM Grid Storage box. Each box holds 10 discs.
    Prod # Description Unit
    21555-10
    		PELCO® Silicon Nitride 3mm Disks
    pkg/10

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