产品名称：YPS Schottky FE source

The tip just penetrates the aperture hole in a cylindrical suppressor electrode mounted around the assembly. Electrons are emitted from the tip due to both thermal excitation and an electrical field at the tip due the potential difference between it and an extractor electrode. The YPS Schottky tip radius is typically 0.3µm to ensure high brightness of the source.
Currently there are three types of FE sources available: The YPS-174, the YPS-184 and the YPS-M20 Mini Module. This product line is aimed to customers who are comfortable with changing field emission sources and know how to change, load and align the TFE cathodes in a clean environment. It is also an excellent product for developers building custom-designed electron beam columns using TFE sources. The operating vacuum for TFE sources is typically better than 1x10^-9 mbar. This is higher than the operating vacuum for tungsten or LaB6 sources, but less stringent than for cold field emission sources.

YPS-174 Standard Schottky FE Module
The YPS-174 is the most common standard Schottky field emitter module which is equivalent in dimensions to both FEI – and Denka – standard Schottky field emission cathodes. The suppressor aperture has a diameter of 400µm. The emitter protrudes 250µm from the suppressor electrode. The YPS-174 is compatible with thermal field emission sources used on systems from Amray, Hitachi, JEOL, ZEISS/LEO, FEI (pre 2002), PHI and Riber.
YPS-184 Schottky FE Module
The YPS-184 Schottky Module is a drop-in alternative for the FEI SEM unit. The suppressor aperture has a diameter of 500µm and the emitter protrudes 250µm from the suppressor electrode. The YPS-184 module is also compatible with Tescan FESEMs.
YPS-M20 Mini Module TFE Source
The YPS-M20 Mini module TFE source is a complete pre-aligned assembly with a smaller style suppressor, ceramic insulator and extractor. The YPS-M20 Mini Module is a high grade alternative FE source for the Applied Materials/OPAL CD-SEMs.
Selection guide for YPS Field emission modules

Instrument Type	TFE Module Emitter Type
Amray	YPS-174-A
Applied / OPAL			YPS-M20-A
FEI (pre 2002)	YPS-174-F
FEI		YPS-184-F
Hitachi (TFE) SEM	YPS-174-H
Hitachi (TFE) CDSEM	YPS-174-C
JEOL (TFE)	YPS-174-J
LEO (Gemini)	YPS-174-L
PHI	YPS-174-P
Riber	YPS-174-R
Tescan		YPS-184-T
ZEISS (Gemini)	YPS-174-Z

Prod #	Description	Unit

1620-174-A

YPS-174-A TFE Source for Amray FESEMs

each

1620-174-C

YPS-174-C TFE Source for Hitachi TFE CD-SEMs

each

1620-174-F

YPS-174-F TFE Source for FEI (pre 2002) FEG-SEMs

each

1620-174-H

YPS-174-H TFE Source for Hitachi FESEMs

each

1620-174-J

YPS-174-J TFE Source for JEOL FESEMs

each

1620-174-L

YPS-174-L TFE Source for LEO Gemini FESEMs

each

1620-174-P

YPS-174-P TFE Source for PHI FE columns

each

1620-174-R

YPS-174-R TFE Source for Riber FE columns

each

1620-174-Z

YPS-174-Z TFE Source for ZEISS Gemini FESEMs

each

1620-184-F

YPS-184-F TFE Source for FEI FEG-SEMs

each

1620-184-T

YPS-184-T TFE Source for TESCAN FESEMs

each

1620-M20-A

YPS-M20-A TFE Source for Applied/Opal CD-SEMs

each